Commercial Products

P181 Ultra Low Pressure Sensor

Top View

Backside View of Cavity Etch & Close-up of Thin Stress Concentration Bosses

The InterMEMS P181 Low Pressure Sensor incorporates a unique state of the art design bulk micro-machined silicon chip with thin Stress Concentration Bosses.  It is targeted toward Level Sensing, Flow, and Medical applications such as Respirators and CPAP where accurate and stable measurement of very low pressures, or flows are necessary.  It eliminates virtually all of the traditional problems that plague other low pressure devices such as large Pressure Non-linearity, short and long term stability, repeatability, Position and Vibration sensitivity, Pressure Symmetry, and poor signal to noise ratio.