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                  Epitaxy Oxidation Photolithography Ion Implant Diffusion / Anneal Sputtering / Evaporation                LPCVD / PECVD Thin Film Deposition | 
                  Bulk Anisotropic Etch Bulk Isotropic EtchSurface Micromachining          SIMOX / BESOI Silicon DRIE  LIGA / SLIGA Micromolding Microstamping Anodic Bonding Wafer Bonding Plating Polymers / Elastomers Piezoelectric Thin FilmsUltra-Thin Lap/Polish of Si and Glass |